Simulating Negative Bias Temperature Instability of p-MOSFETS
The degradation of MOSFET devices having relatively thin oxide layers is generally accepted as being mainly associated with the depassivation of silicon dangling bonds at the Si/SiO2 interface. These dangling bonds are initially passivated during the fabrication process by heating in hydrogen or, more rarely, a deuterium environment. The interface trap density is typically reduced by two orders of magnitude by this passivation process, to around 1010cm-2 or even less[1].