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Thermal 3D

Thermal Packaging Simulator

Thermal 3D is a general heatflow simulation module that predicts heatflow from any power generating devices (not limited to semiconductor devices), typically through a substrate and into the package and/or heatsink via the bonding medium. Operating temperatures for packaged and heat sinked devices or systems can be predicted for the design and optimization phase or for general system analysis.

Key Features

  • Predicts heat flow and temperature rise for material systems and any number of heat generating sources
  • Models validated using measured data
  • Three models for heat dependent thermal conductivity to choose from for each of the materials in the system
  • User definable thermal conductivities and coefficients for each material
  • Very fast simulation times allow many combinations to be tried for system design optimization
  • Seamlessly integrated into Silvaco’s device simulation software framework, Atlas
  • Industry leading, easy to use, multi-dimensional visualization tools for results analysis
  • Interactive, user friendly and flexible runtime environment for quick result generation and analysis with numerous examples
Another temperature simulation in Thermal 3D of GaN HEMT devices this time fabricated onto a b-Silicon Carbide substrate mounted onto a copper heat sink.
Thermal 3D was then used to investigate the optimal spacing between the devices and the effect on operating temperature profile. Here a cut line through the center of the devices is shown together with surface temperature.

 

Thermal3D Experimentally Verified Working Example

  • The experimental AlGaN-GaN HFET structure shown diagrammatically, was constructed in Thermal 3D
  • The experimental data and thermal conductivities were taken from Jeong Park et al., IEEE Electron Device Letters, Vol.24, No.7, July 2003
  • The heat sink on the bottom of the structure was held at 295K (22oC)
  • Unlike the reference, in this Thermal3D simulation example a wider heat sink, together with gold based contacts and air above the structure was also included in the calculations
  • In order to validate the simulation, two device power levels were simulated, that corresponded to the two power levels in the reference for which the device surface temperature was actually measured using liquid crystal
AlGaN-GaN HFET structure here showing only one of the two gates tested with Liquid Crystal under two device power outputs. The same device was simulated using Thermal 3D to verify simulator accuracy.

 

3D Results

  • The created structure can be viewed and zoomed from any angle or cross-section using easy to use, intuitive mouse movements
  • Any parameter calculated in the simulation, such as temperature rise in this case, can be displayed in 3D as a color contour plot
  • The 3D structure can be edited or cross-sectioned to view color contour plots of any calculated parameter anywhere inside the structure. In below for example, the air has been removed to view the temperature of the structure at the device surfaces
Calculated temperature distribution in the 3D double-gated AlGaN-GaN HFET structure. The air has been removed from the structure for clarity. A 2D cross section of the full structure, including air above it, showing the temperature profile. This graphic was a cut plane constructed from the 3D tool which automatically loads the result into the 2D graphic tool.

 

2D Results

  • 2D slices anywhere in the structure are obtained using the “cut line” tool in the 3D viewer. The “cut line” is then exported to the 2D viewer, TonyPlot, for further analysis
  • The detail of the temperature rise near the surface of the device in the “cut line” is shown for a device power output of 0.42 Watts. Notice the highest temperatures are in the ohmic region of the device, in the channels, under the two gates
Detail of temperature distribution around the AlGaN-GaN HFET power source for a 0.42 Watt total power dissipation. Notice temperature rise around the two channel regions under the two gates

 

1D Results

Once the 3D “cut line” has been exported to the 2D viewer, TonyPlot, it can be further analyzed by creating a 1D cross section anywhere in the structure

1D horizontal cross-section near the surface, showing temperature profile for the active device dissipating 0.29 Watts and 0.42 Watts.

 

Rev. 120707_04

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Victory Process

3D Process Simulator

Victory Process is a general purpose 3D process simulator. Victory Process includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit.

Victory Cell

3D Process Simulator For Large Structures

Victory Cell is a fast, layout-driven 3D process simulator specifically designed for large structures.

Athena

Process Simulation Framework

Athena framework integrates several process simulation modules within a user-friendly environment provided by Silvaco TCAD interactive tools.

SSuprem 4

2D Core Process Simulator

SSuprem4 is a 2D process simulator that is widely used in the semiconductor industry for design, analysis and optimization of various fabrication technologies.

MCImplant

Advanced Monte-Carlo Implantation Simulator

MCImplant is a generic ion implantation simulator, which models ion stopping, defect generation, and ion implantation distributions in amorphous and crystalline materials.

Elite

Advanced Physical Etching and Deposit Simulator

Elite is an advanced 2D topography simulator for modeling physical etching, deposition, reflow and CMP planarization processes for modern semiconductor technologies.

MC Etch & Deposit

2D Monte Carlo Deposition and Etch Simulator

MC Deposit/Etch is an advanced topology simulation module seamlessly interfaced with Elite through the ATHENA framework.

Optolith

Advance 2D Optical Lithography Simulator

Optolith is a powerful non-planar 2D lithography simulator that models all aspects of modern deep sub-micron lithography: imaging, exposure, photoresist bake, development and reflow.

Athena 1D

1D Process Simulator

Athena 1D is a 1D mode of operation of the industry standard Athena 2D Process Simulator.

Victory Device

3D Device Simulator

Victory Device is a general purpose 3D device simulator. A tetrahedral meshing engine is used for fast and accurate simulation of complex 3D geometries.

Device 3D

3D Device Simulator

Device3D is a physics based 3D device simulator for any device type and includes material properties for the commonly used semiconductor materials in use today.

Giga 3D

3D Non-Isothermal Device Simulator

Giga3D module extends Device3D by incorporating the effects of self-heating into a device simulation.

MixedMode 3D

Circuit Simulation for Advanced 3D Devices

MixedMode 3D is a circuit simulator that includes physically-based 3D devices in addition to compact analytical models.

Quantum 3D

3D Simulation Models For Quantum Mechanical Effect

Quantum 3D provides a set of models for simulation of the various effects of quantum confinement and quantum transport of carriers in semiconductor devices.

Luminous 3D

3D Optoelectronic Device Simulator

Luminous 3D is an advanced simulator used to model absorption and photogeneration in semiconductor devices with arbitrary topology in three dimensions.

TFT 3D

3D Amorphous and Polycrystaline Device Simulator

TFT 3D is an advanced device technology simulator equipped with the physical models and specialized numerical techniques required to simulate amorphous or polysilicon devices in 3D.

LED 3D

3D Light Emitting Diode Simulator

LED 3D is a module used for simulation and analysis of light emitting diodes. LED 3D is integrated in the ATLAS framework and allows simulation of electrical, optical and thermal behavior of light emitting diodes in 3D.

Magnetic 3D

3D Magnetic Device Simulator

Magnetic 3D module enables the ATLAS device simulator to incorporate the effects of an externally applied magnetic field on the device behaviour.

Thermal 3D

Thermal Packaging Simulator

Thermal 3D is a general heatflow simulation module that predicts heatflow from any power generating devices (not limited to semiconductor devices), typically through a substrate and into the package and/or heatsink via the bonding medium.

Atlas

Device Simulation Framework

Atlas enables device technology engineers to simulate the electrical, optical, and thermal behavior of semiconductor devices.

S-Pisces

2D Silicon Device Simulator

S-Pisces is an advanced 2D device simulator for silicon based technologies that incorporates both drift-diffusion and energy balance transport equations.

Blaze

2D Device Simulator for Advanced Materials

Blaze simulates devices fabricated using advanced materials. It includes a library of binary, ternary and quaternary semiconductors.

Giga

Non-Isothermal Device Simulator

Giga combined with S-Pisces and Blaze device simulators allows simulation of self heating effects.

MixedMode

Circuit Simulation for Advanced 2D Devices

MixedMode is a circuit simulator that includes physically-based devices in addition to compact analytical models.

Quantum

2D Simulation Models for Quantum Mechanical Effects

Quantum provides a set of models for simulation of various effects of quantum confinement and quantum transport of carriers in semiconductor devices.

Luminous

2D Optoelectronics Device Simulator

Luminous is an advanced device simulator specially designed to model light absorption and photogeneration in non-planar semiconductor devices.

TFT

2D Amorphous and Polycrystalline Device Simulator

TFT is an advanced device technology simulator equipped with the physical models and specialized numerical techniques required to simulate amorphous or polysilicon devices including thin film transistors.

LED

2D Light Emitting Diode Simulator

LED is a module used for simulation and analysis of light emitting diodes.

Organic Display

OLED and OTFT Organic Display Simulator

Organic Display module enables ATLAS to simulate the electrical and optical properties of organic display devices such as OTFTs and OLEDs.

Organic Solar

Organic Solar Cell and Photodetector Simulator

Organic Solar module enables ATLAS to simulate the electrical and optical properties of organic solar cell devices, photodetectors and image sensors.

Laser

Semiconductor Laser Diode Simulator

Laser is the world’s first commercially available simulator for semiconductor laser diodes.

VCSEL

Vertical Cavity Surface Emitting Laser Simulations

VCSEL is used in conjunction with the ATLAS framework to produce physically based simulations of vertical cavity surface emitting lasers (VCSELs).

Noise

2D Small-Signal Noise Simulator

Noise combined with S-Pisces or Blaze allows analysis of the small-signal noise generated within semiconductor devices.

Ferro

Ferroelectric Field Dependent Permittivity Model

Ferro has been developed to combine the charge-sheet model of FET with Maxwell’s first equation which describes the properties of the ferroelectric film.

Magnetic

2D Magnetic Device Simulator

Magnetic module enables the ATLAS device simulator to incorporate the effects of an externally applied magnetic field on the device behavior.

Mercury

Fast Simulation of FETS

Mercury is an ATLAS module optimized for the fast simulation of FETs. Mercury is physics-based and so can be used for the predictive simulation of devices.

MC Device

2D Monte Carlo Device Simulator

MC Device simulates the behavior of relaxed and strained silicon devices including non-equilibrium and ballistic effects in 2D.

Victory Stress

3D Stress Simulator

Victory Stress is a generic 3D stress simulator designed to calculate stresses, strains and mobility enhancement for 3D structures as well as stress evolution during multiple step process flows.

DeckBuild

Interactive Deck Development and Runtime Environment

DeckBuild is an interactive runtime and input file development environment within which all Silvaco’s TCAD and several other EDA products can run.

MaskViews

Integrated Layout Editor

MaskViews is a simple to use, yet powerful layout editor that can read, write, create and edit layout files in either GDS2 or Silvaco’s layout format.

DevEdit

Structure and Mesh Editor

DevEdit can be used to either create a device from scratch or to remesh or edit an existing device.

TonyPlot

1D/2D Interactive Visualization Tool

Tonypolot is a powerful tool designed to visualize TCAD 1D and 2D structures produced by Silvaco TCAD simulators. TonyPlot provides visualization and graphic features such as pan, zoom, views, labels and multiple plot support.

TonyPlot 3D

3D Interactive Visualization Tool

TonyPlot 3D is a powerful graphics tool, capable of displaying 3D TCAD data generated by Silvaco TCAD process or device simulators and Silvaco's 3D parasitic products.

VWF

VIRTUAL WAFER FAB

VWF is software used for performing Design of Experiments (DOE) and Optimization Experiments. Split-lots can be used in various pre-defined analysis methods.

Gateway

Schematic Editor

Gateway supports both flat and hierarchical designs and can be used to create designs for both analog and digital. Gateway is fully integrated into our analog and digital simulators.

SmartSpice

Analog Circuit Simulator

SmartSpice delivers the highest performance and accuracy required to design complex high precision analog circuits, analog mixed-signal circuits, analyze critical nets, characterize cell libraries, etc.. SmartSpice is compatible with popular analog design flows and foundry-supplied device models.

Verilog-A Language

Source, Compiled and Encrypted

The Verilog-A language when combined with SmartSpice can provide circuit designers the ability to write custom models and verification of complex designs.

SmartSpice RF

Frequency and time domain RF circuit simulator

SmartSpice RF combines Time-Domain Shooting and Frequency Domain Harmonic Balance methods to provide accurate simulation of RF circuits.

Harmony

Analog/Mixed-Signal Simuator

Hamony is an analog/mixed signal simulator that provides all the capabilities of SmartSpice and Silos and through this give the accuracy, performance, capacity and flexibility to simulate circuits expressed in Verilog, SPICE, Verilog-A and Verilog-AMS.

Utmost III

Device Characterization and modeling

Utmost III generates accurate, high quality SPICE models for analog, mixed-signal and RF applications.

Utmost IV

Optimization Module for Compact/Macro-Modeling

Generates accurate, high quality SPICE models that can be used in analog, mixed-signal and RF simulators.

Spayn

Statistical Parameter and Yield Analysis

Spayn is a statistical modeling tool for analyzing variances from model parameter extraction sequences, electrical test routines, and circuit test measurements.

Expert

Layout Editor and Viewer

Expert is a high performance hierarchical IC layout editor with full editing features, large capacity and fast layout viewing.

Guardian

DRC/LVS/NET Physical Verification

Guardian provides interactive and batch mode verification of analog, mixed signal and RF IC designs.

Hipex

Full-Chip Parasitic Extraction

Hipex is an accurate and fast full-chip hierarchical extraction software that performs extraction of parasitic capacitances and resistances from hierarchical layouts.

Clarity RLC

RLC Netlist Reduction

Clarity RLC is an efficient and accurate tool that performs reduction of linear parasitic RLC elements in extracted netlists. Tool is based on Scattering-Parameter-Based Macromodeling and Time Domain methods.

Exact

Full Chip LPE Rule File Generator

Exact delivers the most accurate interconnect models for nanometer semiconductor processes and generates full chip layout parameter extraction (LPE) rule files.

Quest

3D RF Passive Device Modeling

Quest calculates 3D frequency dependent inductance, resistance, capacitance and capacitive loss for any multi-port network for RF SPICE analysis.

Clever

RC Extractor for Realistic 3D Structures

Clever is a physics-based RC extractor that uses GDSII mask data and process information to create a realistic 3D structure for MEMS, advanced CMOS, TFT, Memory cells, etc., using its built-in etch/deposit processor and optolithographical simulator.

Stellar

3D Physics-Based RC Extractor for Large Cells

Stellar fills the size gap between typical small cell field solvers and full chip extractors.

Silos

Verilog Simulator

Silos is an easy-to-use IEEE-1364-2001 compliant Verilog simulator used by leading IC designers. An industry standard since 1986, its powerful interactive debugging features provide today’s most productive design environment for FPGA, PLD, ASIC and custom digital designs.

HyperFault

Mixed-Level Fault Simulator

HyperFault is a Verilog IEEE-1364-2001 compliant fault simulator that analyzes test vectors’ ability to detect faults. Supports mixed levels of gate, behavioral, and switch with SDF timing.

AccuCell

Cell Characterization and Modeling

AccuCell is an accurate, automated, fast and flexible software tool for characterizing and validating standard cell, I/O and custom cell libraries.

AccuCore

Block Characterization, Modeling and STA

AccuCore performs timing characterization of multi-million device circuits with SmartSpice accuracy and performs block and full-chip Static Timing Analysis (STA) on multi-million gate designs.

Catalyst AD

SPICE Netlist to Verilog Gates Converter

Catalyst AD is the premier tool for converting transistor-level designs into verilog gate-level representations with applications in microprocessor, DSP, graphics and high-speed communication markets.

Catalyst DA

Verilog Netlist to SPICE Netlist Converter

Catalyst DA is a software program that translates a structural Verilog netlist into equivalent SPICE format netlist to be used for layout verification or SPICE simulation.

Spider

Place and Route Design Flow

Spider is a netlist-to-GDSII place and route design flow for mainstream physical design and implementation.